Reverse-tone ultraviolet nanoimprint lithography with fluorescent UV-curable resins
- 期刊名称Japanese Journal of Applied Physics
- 作者Uehara, Takuya; Kubo, Shoichi; Nakagawa, Masaru
- 卷第54卷
- 印刷ISSN0021-4922
- 电子ISSN1347-4065
- 文件大小959.97KB
- 发表时间2015-06-01
- DOI10.7567/JJAP.54.06FM02
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