High Quality 100 mm 4H-SiC Substrate

Gao, Yu Qiang; Zhang, Hong Yan; Song, Jian; Song, Sheng; Liang, Qing Rui; Ning, Min; Gao, Chao; Wang, Xi Jie; Zong, Yan Min; Wang, Huan Huan; Dudley, M.

期刊名称Materials Science Forum
作者Gao, Yu Qiang; Zhang, Hong Yan; Song, Jian; Song, Sheng; Liang, Qing Rui; Ning, Min; Gao, Chao; Wang, Xi Jie; Zong, Yan Min; Wang, Huan Huan; Dudley, M.
电子ISSN1662-9752
文件大小7344.88KB
发表时间2015-6
DOI10.4028/www.scientific.net/MSF.821-823.51
页码51-55

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High Quality 100 mm 4H-SiC Substrate