A Practical Two-Phase Approach to Scheduling of Photolithography Production
- 期刊名称IEEE Transactions on Semiconductor Manufacturing
- 作者Ham, Andy Myoungsoo; Cho, Myeonsig
- 卷第28卷
- 期第3期
- 印刷ISSN0894-6507
- 电子ISSN1558-2345
- 文件大小622.85KB
- 发表时间2015-8
- DOI10.1109/TSM.2015.2451512
- 页码367-373