Influence of residual pressure and ion implantation on the structure, elemental composition, and properties of (TiZrAlYNb)N nitrides

Pogrebnjak, A. D.; Yakushchenko, I. V.; Sobol’, O. V.; Beresnev, V. M.; Kupchishin, A. I.; Bondar, O. V.; Lisovenko, M. A.; Amekura, H.; Kono, K.; Oyoshi, K.; Takeda, Y.

期刊名称Technical Physics
作者Pogrebnjak, A. D.; Yakushchenko, I. V.; Sobol’, O. V.; Beresnev, V. M.; Kupchishin, A. I.; Bondar, O. V.; Lisovenko, M. A.; Amekura, H.; Kono, K.; Oyoshi, K.; Takeda, Y.
卷第60卷
期第8期
印刷ISSN1063-7842
电子ISSN1090-6525
文件大小2745.88KB
发表时间2015-8
DOI10.1134/S1063784215080228
页码1176-1183

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Influence of residual pressure and ion implantation on the structure, elemental composition, and properties of (TiZrAlYNb)N nitrides