Reliable aluminum contact formation by electrostatic bonding
- 期刊名称Journal of Micromechanics and Microengineering
- 作者Kárpáti, T; Pap, A E; Radnóczi, Gy; Beke, B; Bársony, I; Fürjes, P
- 卷第25卷
- 期第7期
- 印刷ISSN0960-1317
- 电子ISSN1361-6439
- 文件大小1246.14KB
- 发表时间2015-07-01
- DOI10.1088/0960-1317/25/7/075009
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