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Nanomechanical and Morphological Characterization of Tungsten Trioxide (WO
<sub/>3</sub>
) Thin Films Grown by Atomic Layer Deposition

Nanomechanical and Morphological Characterization of Tungsten Trioxide (WO ₃ ) Thin Films Grown by Atomic Layer Deposition

Mamun, M. A.; Zhang, K.; Baumgart, H.; Elmustafa, A. A.

期刊名称ECS Journal of Solid State Science and Technology
作者Mamun, M. A.; Zhang, K.; Baumgart, H.; Elmustafa, A. A.
卷第4卷
期第9期
印刷ISSN2162-8769
电子ISSN2162-8777
文件大小467.90KB
发表时间2015
DOI10.1149/2.0241509jss

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