SPIE Proceedings [SPIE SPIE Optifab - Rochester, New York, United States (Monday 12 October 2015)] Optifab 2015 - Recent developments in IR metrology using quadri wave lateral shearing interferometry
- 作者Bentley, Julie L.; Stoebenau, Sebastian; Boucher, W.; Bourgeois, G.; Deprez, M.; Homassel, E.; Wattellier, B.
- 卷第9633卷
- 印刷ISSN0277-786X
- 文件大小2796.12KB
- 发表时间2015
- DOI10.1117/12.2195806
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