High-speed flattening of crystallized glass substrates by dressed-photon–phonon etching
- 期刊名称Applied Physics A
- 作者Nomura, W.; Yatsui, T.; Kawazoe, T.; Tate, N.; Ohtsu, M.
- 卷第121卷
- 期第4期
- 印刷ISSN0947-8396
- 电子ISSN1432-0630
- 文件大小914.43KB
- 发表时间2015-12-4
- DOI10.1007/s00339-015-9466-8
- 页码1403-1407
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