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Anisotropic etching in low-concentration KOH: effects of surfactant concentration

Anisotropic etching in low-concentration KOH: effects of surfactant concentration

Xing, Yan; Haldar, Subhomoy; Sato, Kazuo; Ashok, Akarapu; Pal, Prem

期刊名称Micro & Nano Letters
作者Xing, Yan; Haldar, Subhomoy; Sato, Kazuo; Ashok, Akarapu; Pal, Prem
卷第10卷
期第4期
电子ISSN1750-0443
文件大小461.04KB
发表时间2015-04-01
DOI10.1049/mnl.2014.0685
页码224-228

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