![[IEEE 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS) - Seoul, Korea (South) (2019.1.27-2019.1.31)] 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS) - Highly Sensitive 2D Thermoresistive Micro Calorimetric Flow Sensor by Using $0.35boldsymbol{mu}mathbf{m}$ CMOS MEMS Technology]()
[IEEE 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS) - Seoul, Korea (South) (2019.1.27-2019.1.31)] 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS) - Highly Sensitive 2D Thermoresistive Micro Calorimetric Flow Sensor by Using $0.35boldsymbol{mu}mathbf{m}$ CMOS MEMS TechnologyXu, Wei; Wang, Ruijie; Wang, Xiaoyi; Mousa, Basant; Lee, Yi-Kuen · 2019