发现好书期刊,享受阅读乐趣

海量图书期刊资源,随时随地畅享阅读乐趣

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, United States (Sunday 22 February 2015)] Design-Process-Technology Co-optimization for Manufacturability IX - Breaking through 1D layout limitations and regaining 2D design freedom part II: stitching yield modeling and optimization

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, United States (Sunday 22 February 2015)] Design-Process-Technology Co-optimization for Manufacturability IX - Breaking through 1D layout limitations and regaining 2D design freedom part II: stitching yield modeling and optimization

Sturtevant, John L.; Capodieci, Luigi; Zhou, Jun; Liu, Hongyi; Han, Ting; Chen, Yijian
  • 作者Sturtevant, John L.; Capodieci, Luigi; Zhou, Jun; Liu, Hongyi; Han, Ting; Chen, Yijian
  • 卷第9427卷
  • 印刷ISSN0277-786X
  • 文件大小2326.49KB
  • 发表时间2015
  • DOI10.1117/12.2085898
← 返回【学霸图书馆】主页