Thermal etching of nanocrystalline diamond films

Shahin, David I.; Anderson, Travis J.; Feygelson, Tatyana I.; Pate, Bradford B.; Wheeler, Virginia D.; Greenlee, Jordan D.; Hite, Jennifer K.; Tadjer, Marko J.; Christou, Aristos; Hobart, Karl D.

期刊名称Diamond and Related Materials
作者Shahin, David I.; Anderson, Travis J.; Feygelson, Tatyana I.; Pate, Bradford B.; Wheeler, Virginia D.; Greenlee, Jordan D.; Hite, Jennifer K.; Tadjer, Marko J.; Christou, Aristos; Hobart, Karl D.
卷第59卷
印刷ISSN0925-9635
文件大小1360.32KB
发表时间2015-10
DOI10.1016/j.diamond.2015.09.017
页码116-121

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Thermal etching of nanocrystalline diamond films