Synthesis of thin tantalum films by magnetron sputtering

Luzanov, V. A.; Vedeneev, A. S.; Ryl’kov, V. V.; Temiryazeva, M. P.; Kozlov, A. M.; Dukhnovskii, M. P.; Bugaev, A. S.

期刊名称Journal of Communications Technology and Electronics
作者Luzanov, V. A.; Vedeneev, A. S.; Ryl’kov, V. V.; Temiryazeva, M. P.; Kozlov, A. M.; Dukhnovskii, M. P.; Bugaev, A. S.
卷第60卷
期第12期
印刷ISSN1064-2269
电子ISSN1555-6557
文件大小230.22KB
发表时间2015-12
DOI10.1134/S1064226915110133
页码1325-1327

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