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STRESS TOPOLOGY WITHIN SILICON SINGLE−CRYSTAL CANTILEVER BEAM

STRESS TOPOLOGY WITHIN SILICON SINGLE−CRYSTAL CANTILEVER BEAM

Pavlovich, Kuzmenko Alexander; Timakov, D.

期刊名称Modern Electronic Materials
作者Pavlovich, Kuzmenko Alexander; Timakov, D.
印刷ISSN2452-1779
文件大小1554.40KB
发表时间2015-10
DOI10.1016/j.moem.2015.10.002

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