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SPIE Proceedings [SPIE SPIE Optical Metrology - Munich, Germany (Sunday 21 June 2015)] Modeling Aspects in Optical Metrology V - Propagation invariant laser beams for optical metrology applications

SPIE Proceedings [SPIE SPIE Optical Metrology - Munich, Germany (Sunday 21 June 2015)] Modeling Aspects in Optical Metrology V - Propagation invariant laser beams for optical metrology applications

Bodermann, Bernd; Frenner, Karsten; Silver, Richard M.; Soskind, M.; Soskind, Y. G.
  • 作者Bodermann, Bernd; Frenner, Karsten; Silver, Richard M.; Soskind, M.; Soskind, Y. G.
  • 卷第9526卷
  • 印刷ISSN0277-786X
  • 文件大小732.75KB
  • 发表时间2015
  • DOI10.1117/12.2185794
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