Spatial batch optimal design based on self-learning gaussian process models for LPCVD processes
- 期刊名称Chinese Journal of Chemical Engineering
- 作者Sun, Pei; Xie, Lei; Chen, Junghui
- 卷第23卷
- 期第12期
- 印刷ISSN1004-9541
- 文件大小862.46KB
- 发表时间2015-12
- DOI10.1016/j.cjche.2015.11.013
- 页码1958-1964
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