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Analysis of pressure distribution and verification of pressure signal by changes load and velocity in chemical mechanical polishing

Analysis of pressure distribution and verification of pressure signal by changes load and velocity in chemical mechanical polishing

Lee, Changsuk; Park, Jaehong; Kinoshita, Masaharu; Jeong, Haedo

期刊名称International Journal of Precision Engineering and Manufacturing
作者Lee, Changsuk; Park, Jaehong; Kinoshita, Masaharu; Jeong, Haedo
卷第16卷
期第6期
印刷ISSN2234-7593
电子ISSN2005-4602
文件大小1124.06KB
发表时间2015-6
DOI10.1007/s12541-015-0137-7
页码1061-1066

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