Quencher diffusion in chemically amplified poly(4-hydroxystyrene-
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-butyl methacrylate) resist
Kozawa, Takahiro; Santillan, Julius Joseph; Itani, Toshiro
- 期刊名称Japanese Journal of Applied Physics
- 作者Kozawa, Takahiro; Santillan, Julius Joseph; Itani, Toshiro
- 卷第54卷
- 期第11期
- 印刷ISSN0021-4922
- 电子ISSN1347-4065
- 文件大小744.80KB
- 发表时间2015-11-01
- DOI10.7567/JJAP.54.118002