Design and fabrication of a SAW device with Ta filled microcavities inserted into its delay path for improved power transfer

Richardson, Mandek; Cheemalapati, Surya; Everly, Richard; Sankaranarayanan, Subramanian K. R. S.; Pyayt, Anna; Bhethanabotla, Venkat R.

期刊名称Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
作者Richardson, Mandek; Cheemalapati, Surya; Everly, Richard; Sankaranarayanan, Subramanian K. R. S.; Pyayt, Anna; Bhethanabotla, Venkat R.
卷第33卷
期第2期
印刷ISSN2166-2746
电子ISSN2166-2754
文件大小1382.35KB
发表时间2015-03
DOI10.1116/1.4906515

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