Dose accumulation and 3D imaging with He ⁺ ions

• 期刊名称Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
• 作者Giannuzzi, Lucille A.
• 卷第33卷
• 期第1期
• 印刷ISSN2166-2746
• 电子ISSN2166-2754
• 文件大小946.53KB
• 发表时间2015-01
• DOI10.1116/1.4905091