The Displacement Characteristics of Piezoelectric Ceramic Micro Actuators Evaluated by Laser Interferometer
Wu, Hong; He, Long Biao; Zhou, Jing Lin; Yang, Ping
- 期刊名称Key Engineering Materials
- 作者Wu, Hong; He, Long Biao; Zhou, Jing Lin; Yang, Ping
- 电子ISSN1662-9795
- 文件大小332.94KB
- 发表时间2015-5
- DOI10.4028/www.scientific.net/KEM.645-646.920
- 页码920-925