Simulation technique for pattern inspection using a projection electron microscope
- 期刊名称Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
- 作者Iida, Susumu; Hirano, Ryoichi; Amano, Tsuyoshi; Watanabe, Hidehiro
- 卷第33卷
- 期第6期
- 印刷ISSN2166-2746
- 电子ISSN2166-2754
- 文件大小2535.83KB
- 发表时间2015-11
- DOI10.1116/1.4931932
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