Simulation and characterization of dynamic contact in a MEMS passive vibration threshold sensor
- 期刊名称Microsystem Technologies
- 作者Yang, Zhuoqing; Chen, Wenguo; Ding, Guifu; Wang, Yan; Wang, Hong; Zhao, Xiaolin
- 卷第22卷
- 期第3期
- 印刷ISSN0946-7076
- 电子ISSN1432-1858
- 文件大小4331.68KB
- 发表时间2016-3-26
- DOI10.1007/s00542-015-2578-4
- 页码503-513
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