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Pixelated source optimization for optical lithography via particle swarm optimization

Pixelated source optimization for optical lithography via particle swarm optimization

Wang, Lei; Li, Sikun; Wang, Xiangzhao; Yan, Guanyong; Yang, Chaoxing

期刊名称Journal of Micro/Nanolithography, MEMS, and MOEMS
作者Wang, Lei; Li, Sikun; Wang, Xiangzhao; Yan, Guanyong; Yang, Chaoxing
卷第15卷
期第1期
印刷ISSN1932-5150
文件大小3291.08KB
发表时间2016-02-19
DOI10.1117/1.JMM.15.1.013506

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