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[IEEE 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) - Shanghai, China (2016.1.24-2016.1.28)] 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) - Low-cost temperature-compensated thermoresistive micro calorimetric flow sensor by using 0.35μm CMOS MEMS technology

[IEEE 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) - Shanghai, China (2016.1.24-2016.1.28)] 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) - Low-cost temperature-compensated thermoresistive micro calorimetric flow sensor by using 0.35μm CMOS MEMS technology

Xu, Wei; Gao, Bo; Ma, Shenhui; Zhang, Anping; Chiu, Yi; Lee, Yi-Kuen
  • 作者Xu, Wei; Gao, Bo; Ma, Shenhui; Zhang, Anping; Chiu, Yi; Lee, Yi-Kuen
  • 文件大小659.78KB
  • 发表时间2016
  • DOI10.1109/memsys.2016.7421590
  • 页码189-192
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