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Enhanced Permeability Property of Silicon Oxide Thin Films Deposited by Facing Target Sputtering System for OLED Application

Enhanced Permeability Property of Silicon Oxide Thin Films Deposited by Facing Target Sputtering System for OLED Application

Jin, Ikhyeon; Kim, Dongyoung; Choi, Myunggyu; Sohn, Sunyoung; Kim, Hwamin

期刊名称Molecular Crystals and Liquid Crystals
作者Jin, Ikhyeon; Kim, Dongyoung; Choi, Myunggyu; Sohn, Sunyoung; Kim, Hwamin
卷第626卷
期第1期
印刷ISSN1542-1406
电子ISSN1563-5287
文件大小822.73KB
发表时间2016-02-11
DOI10.1080/15421406.2015.1075845
页码238-245

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