Principles and applications of trans-wafer processing using a 2-μm thulium fiber laser
Mingareev, Ilya; Gehlich, Nils; Bonhoff, Tobias; Abdulfattah, Ali; Sincore, Alex M.; Kadwani, Pankaj; Shah, Lawrence; Richardson, Martin
- 期刊名称The International Journal of Advanced Manufacturing Technology
- 作者Mingareev, Ilya; Gehlich, Nils; Bonhoff, Tobias; Abdulfattah, Ali; Sincore, Alex M.; Kadwani, Pankaj; Shah, Lawrence; Richardson, Martin
- 卷第84卷
- 印刷ISSN0268-3768
- 电子ISSN1433-3015
- 文件大小1645.74KB
- 发表时间2016-6
- DOI10.1007/s00170-015-7870-z
- 页码2567-2578