Athermal Azobenzene-Based Nanoimprint Lithography
Probst, Christian; Meichner, Christoph; Kreger, Klaus; Kador, Lothar; Neuber, Christian; Schmidt, Hans-Werner
- 期刊名称Advanced Materials
- 作者Probst, Christian; Meichner, Christoph; Kreger, Klaus; Kador, Lothar; Neuber, Christian; Schmidt, Hans-Werner
- 卷第28卷
- 期第13期
- 印刷ISSN0935-9648
- 文件大小892.57KB
- 发表时间2016-04
- DOI10.1002/adma.201505552
- 页码2624-2628