Condition Determination of Ultraviolet Light Exposure for High-Throughput Nanoimprinting
Ishito, Yota; Yano, Haruna; Hiroshiba, Nobuya; Kubo, Shoichi; Nakagawa, Masaru
- 期刊名称Chemistry Letters
- 作者Ishito, Yota; Yano, Haruna; Hiroshiba, Nobuya; Kubo, Shoichi; Nakagawa, Masaru
- 印刷ISSN0366-7022
- 电子ISSN1348-0715
- 文件大小237.08KB
- 发表时间2016-09-07
- DOI10.1246/cl.160663