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Structural design of torsional micro-gyroscope having robust drive and sense modes

Structural design of torsional micro-gyroscope having robust drive and sense modes

Jain, Ankush; Gopal, Ram

期刊名称Microsystem Technologies
作者Jain, Ankush; Gopal, Ram
印刷ISSN0946-7076
电子ISSN1432-1858
文件大小1807.15KB
发表时间2016-10-5
DOI10.1007/s00542-016-3157-z

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