Chemical wet etching of germanium assisted with catalytic-metal-particles and electroless-metal-deposition
- 期刊名称Electrochimica Acta
- 作者Ito, Kazuki; Yamaura, Daichi; Ogino, Toshio
- 卷第214卷
- 印刷ISSN0013-4686
- 文件大小2912.86KB
- 发表时间2016-10
- DOI10.1016/j.electacta.2016.08.016
- 页码354-361
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