[IEEE 2016 IEEE International Interconnect Technology Conference / Advanced Metallization Conference (IITC/AMC) - San Jose, CA, USA (2016.5.23-2016.5.26)] 2016 IEEE International Interconnect Technology Conference / Advanced Metallization Conference (IITC/AMC) - Amorphous Co-Ti alloy as a single layer barrier for Co local interconnect structure
Hosseini, Maryamsadat; Koike, Junichi; Sutou, Yuji; Zhao, Larry; Lai, Steven; Arghavani, Reza
- 作者Hosseini, Maryamsadat; Koike, Junichi; Sutou, Yuji; Zhao, Larry; Lai, Steven; Arghavani, Reza
- 文件大小737.78KB
- 发表时间2016
- DOI10.1109/IITC-AMC.2016.7507718
- 页码162-164