A Multistep DRIE Process for Complex Terahertz Waveguide Components

Jung-Kubiak, Cecile; Reck, Theodore J.; Siles, Jose V.; Lin, Robert; Lee, Choonsup; Gill, John; Cooper, Ken; Mehdi, Imran; Chattopadhyay, Goutam

期刊名称IEEE Transactions on Terahertz Science and Technology
作者Jung-Kubiak, Cecile; Reck, Theodore J.; Siles, Jose V.; Lin, Robert; Lee, Choonsup; Gill, John; Cooper, Ken; Mehdi, Imran; Chattopadhyay, Goutam
印刷ISSN2156-342X
电子ISSN2156-3446
文件大小878.09KB
发表时间2016
DOI10.1109/tthz.2016.2593793
页码1-6

发现好书期刊，享受阅读乐趣