Fabrication of InGaN thin-film transistors using pulsed sputtering deposition
- 期刊名称Scientific Reports
- 作者Itoh, Takeki; Kobayashi, Atsushi; Ueno, Kohei; Ohta, Jitsuo; Fujioka, Hiroshi
- 卷第6卷
- 电子ISSN2045-2322
- 文件大小609.92KB
- 发表时间2016-7-7
- DOI10.1038/srep29500
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