A hybrid chemo-/grapho- epitaxial alignment strategy for defect reduction in sub-10 nm directed self-assembly of silicon-containing block copolymers

Blachut, Gregory; Sirard, Stephen M.; Maher, Michael J.; Asano, Yusuke; Someya, Yasunobu; Lane, Austin P.; Durand, William J.; Bates, Christopher M.; Dinhobl, Andrew M.; Gronheid, Roel; Hymes, Diane; Ellison, Christopher J; Willson, C. Grant

期刊名称Chemistry of Materials
作者Blachut, Gregory; Sirard, Stephen M.; Maher, Michael J.; Asano, Yusuke; Someya, Yasunobu; Lane, Austin P.; Durand, William J.; Bates, Christopher M.; Dinhobl, Andrew M.; Gronheid, Roel; Hymes, Diane; Ellison, Christopher J; Willson, C. Grant
印刷ISSN0897-4756
电子ISSN1520-5002
文件大小3470.99KB
发表时间2016-11-23
DOI10.1021/acs.chemmater.6b03633

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A hybrid chemo-/grapho- epitaxial alignment strategy for defect reduction in sub-10 nm directed self-assembly of silicon-containing block copolymers