Six-axis AFM in SEM with self-sensing and self-transduced cantilever for high speed analysis and nanolithography

• 期刊名称Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
• 作者Angelov, Tihomir; Ahmad, Ahmad; Guliyev, Elshad; Reum, Alexander; Atanasov, Ivaylo; Ivanov, Tzvetan; Ishchuk, Valentyn; Kaestner, Marcus; Krivoshapkina, Yana; Lenk, Steve; Lenk, Claudia; Rangelow, Ivo W.; Holz, Mathias; Nikolov, Nikolay
• 卷第34卷
• 期第6期
• 印刷ISSN2166-2746
• 电子ISSN2166-2754
• 文件大小2587.66KB
• 发表时间2016-11
• DOI10.1116/1.4964290