[IEEE 2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) - Sendai, Japan (2016.4.17-2016.4.20)] 2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) - Deposition of Parylene C and characterization of its hermeticity for the encapsulation of MEMS and medical devices
- 作者Selbmann, Franz; Baum, Mario; Wiemer, Maik; Gessner, Thomas
- 文件大小1498.74KB
- 发表时间2016
- DOI10.1109/NEMS.2016.7758283
- 页码427-432
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