Pattern-generation and pattern-transfer for single-digit nano devices

Rangelow, Ivo W.; Ahmad, Ahmad; Ivanov, Tzvetan; Kaestner, Marcus; Krivoshapkina, Yana; Angelov, Tihomir; Lenk, Steve; Lenk, Claudia; Ishchuk, Valentyn; Hofmann, Martin; Nechepurenko, Diana; Atanasov, Ivaylo; Volland, Burkhard; Guliyev, Elshad; Durrani, Zahid; Jones, Mervyn; Wang, Chen; Liu, Dixi; Reum, Alexander; Holz, Mathias; Nikolov, Nikolay; Majstrzyk, Wojciech; Gotszalk, Teodor; Staaks, Daniel; Dallorto, Stefano; Olynick, Deirdre L.

期刊名称Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
作者Rangelow, Ivo W.; Ahmad, Ahmad; Ivanov, Tzvetan; Kaestner, Marcus; Krivoshapkina, Yana; Angelov, Tihomir; Lenk, Steve; Lenk, Claudia; Ishchuk, Valentyn; Hofmann, Martin; Nechepurenko, Diana; Atanasov, Ivaylo; Volland, Burkhard; Guliyev, Elshad; Durrani, Zahid; Jones, Mervyn; Wang, Chen; Liu, Dixi; Reum, Alexander; Holz, Mathias; Nikolov, Nikolay; Majstrzyk, Wojciech; Gotszalk, Teodor; Staaks, Daniel; Dallorto, Stefano; Olynick, Deirdre L.
卷第34卷
期第6期
印刷ISSN2166-2746
电子ISSN2166-2754
文件大小2887.80KB
发表时间2016-11
DOI10.1116/1.4966556

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Pattern-generation and pattern-transfer for single-digit nano devices