[IEEE 2016 21st International Conference on Ion Implantation Technology (IIT) - Tainan, Taiwan (2016.9.26-2016.9.30)] 2016 21st International Conference on Ion Implantation Technology (IIT) - Advances in Ion Source Life: The AMAT Trident XP Source
Cucchetti, Antonella; Perel, Alexander; Chaney, Craig; Sporleder, David; LeBlanc, Wayne; McCarty, Morgan; Lindberg, Bob
- 作者Cucchetti, Antonella; Perel, Alexander; Chaney, Craig; Sporleder, David; LeBlanc, Wayne; McCarty, Morgan; Lindberg, Bob
- 文件大小1310.46KB
- 发表时间2016
- DOI10.1109/IIT.2016.7882847
- 页码1-4