[IEEE 2016 14th International Baltic Conference on Atomic Layer Deposition (BALD) - St. Petersburg, Russia (2016.10.2-2016.10.4)] 2016 14th International Baltic Conference on Atomic Layer Deposition (BALD) - I–V curve investigation with regression methods
Antonov, Andrei Yu.; Varayun', Marina I.
- 作者Antonov, Andrei Yu.; Varayun', Marina I.
- 文件大小90.99KB
- 发表时间2016
- DOI10.1109/BALD.2016.7886533
- 页码41-43