![SPIE Proceedings [SPIE Advanced Lithography - San Jose, CA (Sunday 24 February 2008)] Design for Manufacturability through Design-Process Integration II - <title>Automatic hotspot classification using pattern-based clustering</title>]()
SPIE Proceedings [SPIE Advanced Lithography - San Jose, CA (Sunday 24 February 2008)] Design for Manufacturability through Design-Process Integration II - <title>Automatic hotspot classification using pattern-based clustering</title>Ma, Ning; Ghan, Justin; Mishra, Sandipan; Spanos, Costas; Poolla, Kameshwar; Rodriguez, Norma; Capodieci, Luigi; Singh, Vivek K.; Rieger, Michael L. · 2008