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Mechatronic Development and Vision Feedback Control of a Nanorobotics Manipulation System inside SEM for Nanodevice Assembly

Yang, Zhan; Wang, Yaqiong; Yang, Bin; Li, Guanghui; Chen, Tao; Nakajima, Masahiro; Sun, Lining; Fukuda, Toshio

期刊名称Sensors
作者Yang, Zhan; Wang, Yaqiong; Yang, Bin; Li, Guanghui; Chen, Tao; Nakajima, Masahiro; Sun, Lining; Fukuda, Toshio
卷第16卷
期第9期
电子ISSN1424-8220
文件大小5066.13KB
发表时间2016-09-14
DOI10.3390/s16091479