Manipulation of cluster formation through gas-wall boundary conditions in large area cluster sources

• 期刊名称Surface and Coatings Technology
• 作者Rudd, Roya; Obrusník, Adam; Zikán, Petr; Pratt, Rodney; Hall, Colin; Murphy, Peter; Evans, Drew; Charrault, Eric
• 卷第314卷
• 印刷ISSN0257-8972
• 文件大小1503.80KB
• 发表时间2017-03
• DOI10.1016/j.surfcoat.2016.10.058
• 页码125-130