Subdiffraction plasmonic lens lithography prototype in stepper mode
Liu, Minggang; Zhao, Chengwei; Luo, Yunfei; Zhao, Zeyu; Wang, Yanqin; Gao, Ping; Wang, Changtao; Luo, Xiangang
- 期刊名称Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
- 作者Liu, Minggang; Zhao, Chengwei; Luo, Yunfei; Zhao, Zeyu; Wang, Yanqin; Gao, Ping; Wang, Changtao; Luo, Xiangang
- 卷第35卷
- 期第1期
- 印刷ISSN2166-2746
- 电子ISSN2166-2754
- 文件大小3977.60KB
- 发表时间2017-01
- DOI10.1116/1.4972521