Fabrication process induced changes in scattering parameters of meander type RFMEMS shunt switch
- 期刊名称Microsystem Technologies
- 作者Sharma, Updesh; Kumar, Manoj; Sharma, Renu; Saha, Tulana; Jain, K. K.; Dutta, Shankar; Sharma, E. K.
- 印刷ISSN0946-7076
- 电子ISSN1432-1858
- 文件大小2891.06KB
- 发表时间2017-2-11
- DOI10.1007/s00542-017-3314-z
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