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Closed-form modelling and design analysis of V- and Z-shaped electrothermal microactuators

Closed-form modelling and design analysis of V- and Z-shaped electrothermal microactuators

Zhang, Zhuo; Zhang, Weize; Wu, Qiyang; Yu, Yueqing; Liu, Xinyu; Zhang, Xuping
  • 期刊名称Journal of Micromechanics and Microengineering
  • 作者Zhang, Zhuo; Zhang, Weize; Wu, Qiyang; Yu, Yueqing; Liu, Xinyu; Zhang, Xuping
  • 卷第27卷
  • 期第1期
  • 印刷ISSN0960-1317
  • 电子ISSN1361-6439
  • 文件大小3123.68KB
  • 发表时间2017-01-01
  • DOI10.1088/1361-6439/27/1/015023
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