Silicon Chemistry in Fluorinated Chemical Vapor Deposition of Silicon Carbide

Stenberg, Pontus; Sukkaew, Pitsiri; Farkas, Ildiko; Kordina, Olof; Janzén, Erik; Ojamäe, Lars; Danielsson, Örjan; Pedersen, Henrik

期刊名称The Journal of Physical Chemistry C
作者Stenberg, Pontus; Sukkaew, Pitsiri; Farkas, Ildiko; Kordina, Olof; Janzén, Erik; Ojamäe, Lars; Danielsson, Örjan; Pedersen, Henrik
卷第121卷
期第5期
印刷ISSN1932-7447
电子ISSN1932-7455
文件大小2826.62KB
发表时间2017-02-09
DOI10.1021/acs.jpcc.6b10849
页码2711-2720

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