Evolution of sputtering target surface composition in reactive high power impulse magnetron sputtering
- 期刊名称Journal of Applied Physics
- 作者Kubart, T.; Aijaz, A.
- 卷第121卷
- 期第17期
- 印刷ISSN0021-8979
- 电子ISSN1089-7550
- 文件大小1945.46KB
- 发表时间2017-05-07
- DOI10.1063/1.4977814
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