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Thermal stability and optical properties of Sc-doped copper nitride films

Yu, Aiai; Ma, Yuhui; Chen, Aishi; Li, Yangyang; Zhou, Yunhua; Wang, Zhongchao; Zhang, Jian; Chu, Liang; Yang, Jianping; Li, Xing'ao

期刊名称Vacuum
作者Yu, Aiai; Ma, Yuhui; Chen, Aishi; Li, Yangyang; Zhou, Yunhua; Wang, Zhongchao; Zhang, Jian; Chu, Liang; Yang, Jianping; Li, Xing'ao
卷第141卷
印刷ISSN0042-207X
文件大小1246.52KB
发表时间2017-07
DOI10.1016/j.vacuum.2017.04.024
页码243-248