Nonlinear thermo-mechanical behaviour of MEMS resonators
- 期刊名称Microsystem Technologies
- 作者Farokhi, Hamed; Ghayesh, Mergen H.
- 印刷ISSN0946-7076
- 电子ISSN1432-1858
- 文件大小1305.28KB
- 发表时间2017-5-4
- DOI10.1007/s00542-017-3381-1
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